General Medicine (ISSN:1311-1817) is a monthly peer-reviewed scopus indexed journal from 2001 to Present. It Publisher Meditsinski Universitet - Sofia. General Medicine is committed gathering and disseminating excellent research achievements, Inspiring medical innovation and Promoting the Development of Disciplines. GM welcomes all types of medical journal includes medicine, pharmacy, bio-chemistry, psychology,Public health etc.
This paper presents a systematic and efficient design approach for the two degree-of-freedom (2-DoF) capacitive microelectromechanical systems (MEMS) accelerometer by using combined design and analysis of computer experiments (DACE) and Gaussian process (GP) modelling. Multiple output responses of the MEMS accelerometer including natural frequency, proof mass displacement, pull-in voltage, capacitance change, and Brownian noise equivalent acceleration (BNEA) are optimized simultaneously with respect to the geometric design parameters, environmental conditions, and microfabrication process c